Title :
National Nanofabrication Centre at IISc Bangalore: A Chronicle of Design, Construction and Management of Cleanroom in Indian Context
Author :
Murthy, Tums ; Vijayaraghavan, M.N. ; Savitha, P. ; Hegde, Gopal ; Raghavan, Srinivasan ; Kumar, P. S Anil ; Pratap, Rudra ; Bhat, Navakanta
Author_Institution :
Centre for Nano Sci. & Eng., Indian Inst. of Sci., Bangalore, India
Abstract :
We present the evolution of the state-of-the-art multiuser, open access, Nanofab facility at the Indian Institute of Science Bangalore. The process behind the design and execution of the cleanroom will be described. The challenges faced in moving the equipments from the old facility and the issues in coordinating installation of new equipments and utility hookup will be presented. The methodology used to manage the facility, challenges in staffing to run the facility and balancing the time sharing between internal and external users will be discussed.
Keywords :
clean rooms; nanofabrication; IISc Bangalore; Indian Institute of Science Bangalore; Indian context; cleanroom; multiuser open access nanofab facility; national nanofabrication centre; Context; Contracts; Educational institutions; Materials processing; Nanoelectronics; Nanofabrication; Substrates;
Conference_Titel :
University/Government/Industry, Micro/Nano Symposium (UGIM), 2012 19th Biennial
Conference_Location :
Berkeley, CA
Print_ISBN :
978-1-4577-1751-2
Electronic_ISBN :
0749-6877
DOI :
10.1109/UGIM.2012.6247096