Numerical analysis of coplanar-lines of arbitrary structure and its application to micro-probe design for MMIC on-wafer measurement

Author

Zhou, Lingyun ; Wang, Weidong ; Fan, Desen

Author_Institution

Dept. of Electron. Eng. & Inf. Sci., Univ. of Sci. & Technol. of China, Hefei, China

Volume

3

fYear

1997

fDate

2-5 Dec 1997

Firstpage

985

Abstract

A moment solution procedure of combined electric potential and bounded-charge integral equation system is presented for the analysis of TEM-wave transmission lines of general form. As an application example of the general procedure, a computer program is developed to precisely predict the circuit parameters of the coplanar-lines of special structure, which make up the micro-probes for MMIC on-wafer measurement. While these micro-probes have been widely tested and applied, we have not seen that any quantitative analysis and design of the micro-probes has been published

Keywords

MMIC; integral equations; integrated circuit measurement; method of moments; microwave measurement; network analysers; probes; MMIC on-wafer measurement; TEM-wave transmission lines; bounded-charge integral equation system; circuit parameters; coplanar-lines; electric potential; micro-probe design; moment solution procedure; Conductors; Coplanar transmission lines; Dielectrics; Distributed parameter circuits; Electric potential; Integral equations; MMICs; Numerical analysis; Probes; Transmission line theory;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference Proceedings, 1997. APMC '97, 1997 Asia-Pacific

Print_ISBN

962-442-117-X

Type

conf

DOI

10.1109/APMC.1997.656370

Filename

656370