DocumentCode
2710423
Title
Development of single-material multi-layer interference filter with sub-wavelength structure for cryogenic infrared astronomical missions
Author
Wada, T. ; Makitsubo, H. ; Mita, M.
Author_Institution
Inst. of Space & Astronaut. Sci., Japan Aerosp. Exploration Agency, Sagamihara, Japan
fYear
2010
fDate
5-10 Sept. 2010
Firstpage
1
Lastpage
2
Abstract
We are developing single-material (all-silicon) interference filter for cryogenic infrared astronomy. Layers with different refractive indices and multi-layer structure are realized by sub-wavelength structure fabricated by photo lithography and wafer bonding technique, respectively.
Keywords
microfabrication; optical multilayers; photolithography; refractive index; wafer bonding; cryogenic infrared astronomical missions; multilayer structure; photolithography; refractive indices; single-material multi-layer interference filter; sub-wavelength structure; wafer bonding technique; Band pass filters; Filtering theory; Interference; Optical filters; Refractive index; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Infrared Millimeter and Terahertz Waves (IRMMW-THz), 2010 35th International Conference on
Conference_Location
Rome
Print_ISBN
978-1-4244-6655-9
Type
conf
DOI
10.1109/ICIMW.2010.5612458
Filename
5612458
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