Title :
Key Considerations for Selection of Diffusion Furnaces
Author_Institution :
Univ. of Utah, Salt Lake City, UT, USA
Abstract :
Diffusion furnaces are an integral part of nano and micro-fabrication. Research micro-fabrication labs often face the challenge of selecting furnaces that can minimize cost and space requirements, while maximizing process flexibility. This presentation will discuss several LPCVD and atmospheric furnace options that labs may find useful when selecting furnaces for their facility.
Keywords :
chemical vapour deposition; furnaces; microfabrication; nanofabrication; LPCVD; atmospheric furnace; diffusion furnaces; microfabrication; nanofabrication; Boats; Educational institutions; Face; Furnaces; Power demand; Substrates; Tracking;
Conference_Titel :
University/Government/Industry, Micro/Nano Symposium (UGIM), 2012 19th Biennial
Conference_Location :
Berkeley, CA
Print_ISBN :
978-1-4577-1751-2
Electronic_ISBN :
0749-6877
DOI :
10.1109/UGIM.2012.6247107
