• DocumentCode
    2710916
  • Title

    A Linearity Improvement Technique for Thin-film Barium Strontium Titanate Capacitors

  • Author

    Fu, Jia-Shiang ; Zhu, Xinen Alfred ; Chen, Ding-Yuan ; Phillips, Jamie D. ; Mortazawi, Amir

  • Author_Institution
    Michigan Univ., Ann Arbor, MI
  • fYear
    2006
  • fDate
    11-16 June 2006
  • Firstpage
    560
  • Lastpage
    563
  • Abstract
    A device architecture is proposed to improve the linearity of barium strontium titanate (BST) capacitors while maintaining the tunability and the quality factor. Thin-film parallel plate capacitors are fabricated utilizing the proposed architecture. The measurement results successfully demonstrate the effectiveness of this approach. Up to 14 dB of improvement on IIP3 is observed
  • Keywords
    Q-factor; barium compounds; strontium compounds; thin film capacitors; tuning; intermodulation distortion; linearity improvement technique; parallel plate capacitors; quality factor; thin-film barium strontium titanate capacitors; tunable capacitor; Barium; Binary search trees; Capacitors; Electrodes; Ferroelectric materials; Linearity; Strontium; Titanium compounds; Transistors; Voltage; Barium strontium titanate (BST); ferroelectric; intermodulation distortion; linearity; tunable capacitor;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Symposium Digest, 2006. IEEE MTT-S International
  • Conference_Location
    San Francisco, CA
  • ISSN
    0149-645X
  • Print_ISBN
    0-7803-9541-7
  • Electronic_ISBN
    0149-645X
  • Type

    conf

  • DOI
    10.1109/MWSYM.2006.249654
  • Filename
    4014960