Integrated micro-electro-mechanical sensor development for inertial applications

Author

Allen, J.J. ; Kinney, R.D. ; Sarsfield, J. ; Daily, M.R. ; Ellis, J.R. ; Smith, J.H. ; Montague, S. ; Howe, R.T. ; Boser, B.E. ; Horowitz, R. ; Pisano, A.P. ; Lemkin, M.A. ; Clark, W.A. ; Juneau, T.

Author_Institution

Sandia Nat. Labs., Albuquerque, NM, USA

fYear

1998

fDate

20-23 Apr 1998

Firstpage

9

Lastpage

16

Abstract

Electronic sensing circuitry and micro-electromechanical sense elements can be integrated to produce inertial instruments for applications unheard of a few years ago. This paper describes the Sandia M³EMS fabrication process, inertial instruments that have been fabricated, and the results of initial characterization tests of micro-machined accelerometers

Keywords

CMOS integrated circuits; accelerometers; inertial systems; integrated circuit technology; microsensors; Sandia M³EMS fabrication; Si; electronic sensing circuitry; inertial applications; inertial instruments; integrated microelectromechanical sensor; microelectromechanical sense elements; micromachined accelerometers; tests; Accelerometers; Annealing; CMOS process; CMOS technology; Fabrication; Instruments; Manufacturing processes; Measurement units; Microelectronics; Micromechanical devices;

fLanguage

English

Publisher

ieee

Conference_Titel

Position Location and Navigation Symposium, IEEE 1998

Conference_Location

Palm Springs, CA

Print_ISBN

0-7803-4330-1

Type

conf

DOI

10.1109/PLANS.1998.669863

Filename

669863