Next Generation Quartz Oscillators and Filters for VHF-UHF Systems

Author

Kubena, R.L. ; Stratton, F.P. ; Chang, D.T. ; Joyce, R.J. ; Hsu, T.Y. ; Lim, M.K. ; M´Closkey, R.T.

Author_Institution

LLC, Malibu, CA

fYear

2006

fDate

11-16 June 2006

Firstpage

668

Lastpage

671

Abstract

We report on the development of a new MEMS-based quartz resonator technology that allows for the processing and integration of VHF to UHF high-Q oscillators and filters with high-speed silicon or III-V electronics. This paper describes the first demonstration of prototype oscillators and filters using this newly developed technology. We present impedance, Q, and temperature sensitivity data of UHF resonators along with phase noise and Allan deviation measurements. Our first 2-pole filter data showing low insertion loss is also presented. Finally, the results of power handling measurements are described for applications where high levels of background signals are present

Keywords

III-V semiconductors; UHF filters; UHF oscillators; VHF filters; VHF oscillators; crystal filters; crystal resonators; elemental semiconductors; micromechanical resonators; quartz; silicon; 2-pole filter data; Allan deviation measurements; III-V electronics; MEMS; UHF filters; UHF resonators; VHF filters; VHF-UHF systems; high-Q oscillators; phase noise; power handling measurements; quartz oscillators; quartz resonator technology; silicon electronics; III-V semiconductor materials; Impedance measurement; Oscillators; Phase noise; Prototypes; Q measurement; Resonator filters; Silicon; Temperature sensors; UHF measurements; acoustic filters; microelectromechanical devices; oscillator stability; phase noise; resonators;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest, 2006. IEEE MTT-S International

Conference_Location

San Francisco, CA

ISSN

0149-645X

Print_ISBN

0-7803-9541-7

Electronic_ISBN

0149-645X

Type

conf

DOI

10.1109/MWSYM.2006.249703

Filename

4014991