Title :
Vibrating RF MEMS for Timing and Frequency References
Author_Institution :
Discera, Ann Arbor, MI
Abstract :
This paper presents recent progresses on making vibrating RF MEMS oscillators for timing and frequency reference applications. Starting from the performance requirements of an oscillator in various systems, the key aspects of MEMS oscillators, including resonator design, oscillator performances, temperature compensation, packaging and integrations, are reviewed. Future directions of the research are also suggested at the end of the paper
Keywords :
compensation; crystal oscillators; crystal resonators; electronics packaging; micromechanical resonators; MEMS resonator; RF MEMS oscillators; packaging process; temperature compensation; Acoustic beams; Frequency; Laser excitation; Micromechanical devices; Oscillators; Packaging; Q factor; Radiofrequency microelectromechanical systems; Temperature; Timing; RF MEMS; micromechanical resonators; oscillators;
Conference_Titel :
Microwave Symposium Digest, 2006. IEEE MTT-S International
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-9541-7
Electronic_ISBN :
0149-645X
DOI :
10.1109/MWSYM.2006.249704
