Title :
High-Aspect-Ratio SOI Vibrating Micromechanical Resonators and Filters
Author :
Ayazi, Farrokh ; Pourkamali, Siavash ; Ho, Gavin K. ; Abdolvand, Reza
Author_Institution :
Georgia Inst. of Technol., Atlanta, GA
Abstract :
This paper presents a review of single crystal silicon bulk acoustic wave resonators and filters. Silicon-on-insulator (SOI) substrates are utilized to implement high quality factor (Q) integrated silicon resonators with capacitive and/or piezoelectric transducers. These resonators cover a wide range of frequencies including HF, VHF and UHF
Keywords :
Q-factor; acoustic filters; acoustic resonators; bulk acoustic wave devices; capacitive sensors; micromechanical resonators; piezoelectric transducers; silicon-on-insulator; bulk acoustic wave resonators; capacitive transducers; integrated silicon resonators; micromechanical filters; micromechanical resonators; piezoelectric transducers; quality factor; silicon-on-insulator substrates; Acoustic waves; Equations; Impedance; Micromechanical devices; Piezoelectric transducers; Q factor; Resonance; Resonant frequency; Resonator filters; Silicon; MEMS; Micromechanical resonators; SOI; bulk acoustic wave resonator; micromechanical filters;
Conference_Titel :
Microwave Symposium Digest, 2006. IEEE MTT-S International
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-9541-7
Electronic_ISBN :
0149-645X
DOI :
10.1109/MWSYM.2006.249705
