Title :
Terahertz tomography system using fiber lasers and applications
Author :
Ouchi, T. ; Kajiki, K. ; Shioda, M. ; Kasai, S. ; Kawase, K. ; Itsuji, T.
Author_Institution :
Corp. R&D Headquarters, Canon Inc., Tokyo, Japan
Abstract :
High depth-resolution terahertz three-dimensional tomography was developed by monocycle-like terahertz pulses using ultra-short pulse fiber lasers. We designed novel photoconductive devices such as a thin-film LT-GaAs detector on Si substrates and an LT-InGaAs emitter for the monocycle waveforms. The depth resolution exhibited under 20 μm in the air and three-dimensional imaging was successfully obtained for multi-layer semiconductor devices.
Keywords :
fibre lasers; high-speed optical techniques; measurement by laser beam; optical tomography; terahertz spectroscopy; terahertz wave imaging; GaAs-Si; InGaAs; fiber lasers; high depth resolution terahertz three dimensional tomography; monocycle like terahertz pulse; monocycle waveform; multilayer semiconductor device; photoconductive devices; size 20 mum; terahertz tomography; ultra short pulse fiber laser; Fiber lasers; Gallium arsenide; Optical fiber devices; Silicon; Substrates; Tomography;
Conference_Titel :
Infrared Millimeter and Terahertz Waves (IRMMW-THz), 2010 35th International Conference on
Conference_Location :
Rome
Print_ISBN :
978-1-4244-6655-9
DOI :
10.1109/ICIMW.2010.5612530
