Universal surfaces for the accurate contact resistivity extraction on Kelvin structures with upper and lower resistive layers

An accurate procedure to extract contact resistivity from contact resistance measurements made on both D-Resistor and L-Resistor type Kelvin cross test structures with both upper and lower resistive layers is presented. The method is based on the obtention of a set of “Universal Surfaces” through computer simulation. Using adimensional variables these surfaces can be employed in all experimental conditions, eliminating the need of further simulations