DocumentCode
2711969
Title
THz uncooled microbolometer array development for active imaging and spectroscopy applications
Author
Simoens, François ; Meilhan, Jérôme ; Pocas, Stéphane ; Ouvrier-Buffet, Jean-Louis ; Maillou, Thierry ; Gellie, Pierre ; Barbieri, Stefano
Author_Institution
CEA Leti-MINATEC, Grenoble, France
fYear
2010
fDate
5-10 Sept. 2010
Firstpage
1
Lastpage
2
Abstract
A first prototype of 320×240 antenna-coupled un-cooled a-Si micro-bolometers array has been designed and processed. Beam profiles emitted by THz QCLs have been imaged while different samples were introduced in the THz beam optical path. We report first essays of material identification.
Keywords
amorphous semiconductors; bolometers; elemental semiconductors; quantum cascade lasers; silicon; submillimetre wave antennas; submillimetre wave imaging; terahertz spectroscopy; terahertz wave imaging; THz QCL; THz beam optical path; THz uncooled microbolometer array; active imaging; antenna-coupled uncooled a-Si microbolometer array; beam profile; quantum cascade laser; spectroscopy application; Arrays; Imaging; Laser beams; Materials; Optical beams; Pixel; Quantum cascade lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Infrared Millimeter and Terahertz Waves (IRMMW-THz), 2010 35th International Conference on
Conference_Location
Rome
Print_ISBN
978-1-4244-6655-9
Type
conf
DOI
10.1109/ICIMW.2010.5612553
Filename
5612553
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