Title :
Prevention of convex corner undercutting in fabrication of silicon microcantilevers by wet anisotropic etching
Author :
JovicÌ, V. ; Lamovec, J. ; MladenovicÌ, I. ; SmiljanicÌ, M.M. ; PopovicÌ, B.
Author_Institution :
Inst. of Chem., Technol. & Metall., Univ. of Belgrade, Belgrade, Serbia
Abstract :
This paper presents microcantilever fabrication on {100} oriented Si substrate using bulk micromachining technique. Detailed characteristics of convex corner compensation design for 〈100〉 oriented beam for two etching solutions: 25 wt. % TMAH and 30 wt. % KOH water solutions at 80 °C are given.
Keywords :
cantilevers; etching; micromachining; micromechanical devices; silicon; KOH; Si; bulk micromachining technique; convex corner compensation design; convex corner undercutting; etching solutions; silicon microcantilever fabrication; temperature 80 C; water solutions; wet anisotropic etching; Fabrication; Micromachining; Shape; Silicon; Substrates; Wet etching;
Conference_Titel :
Microelectronics Proceedings - MIEL 2014, 2014 29th International Conference on
Conference_Location :
Belgrade
Print_ISBN :
978-1-4799-5295-3
DOI :
10.1109/MIEL.2014.6842111
