Title :
Sputtered gold nanostructures
Author :
SzaboÌ, O. ; FlickyngerovaÌ, S. ; TvarozÌŒek, V. ; NovotnyÌ, I.
Author_Institution :
Inst. of Electron. & Photonics, Slovak Univ. of Technol., Bratislava, Slovakia
Abstract :
The forming of Au nanostructures on Corning glass substrates and transparent conductive oxide ZnO:Al thin films by the RF diode sequential sputtering is presented. Morphology of Au structures was analysed by scanning electron microscopy with the free ImageJ software and optical transparency was evaluate by UV-Vis spectrometry. Sputtering power density (deposition rate) and nominal Au thickness caused changes of size and nearest neighbour distance of Au nanostructures as well as it lowered the optical transparency.
Keywords :
aluminium; gold; nanostructured materials; scanning electron microscopy; sputter deposition; thin films; transparency; visible spectrometers; zinc compounds; Al; Au; Corning glass substrates; RF diode sequential sputtering; UV-Vis spectrometry; ZnO; deposition rate; free ImageJ software; gold structure morphology; optical transparency; scanning electron microscopy; sputtered gold nanostructures; sputtering power density; thin films; transparent conductive oxide; Density measurement; Glass; Gold; Nanostructures; Power system measurements; Sputtering; Substrates;
Conference_Titel :
Microelectronics Proceedings - MIEL 2014, 2014 29th International Conference on
Conference_Location :
Belgrade
Print_ISBN :
978-1-4799-5295-3
DOI :
10.1109/MIEL.2014.6842133
