Title :
Effect of patterned copper layer on selective polymer removal by 355 nm laser
Author :
Balogh, Baht ; Gordon, Péter ; Berényi, Richard ; Illyefalvi-Vitéz, Zsolt
Keywords :
Chemical lasers; Chemical technology; Copper; Drilling; Etching; Laser modes; Optical control; Optical materials; Polymers; Pump lasers;
Conference_Titel :
Polymers and Adhesives in Microelectronics and Photonics, 2004. POLYTRONIC 2004. 4th IEEE International Conference on
Print_ISBN :
0-7803-8744-9
DOI :
10.1109/POLYTR.2004.1402768
