A Study of Fabry-Perot Optical MEMS Pressure Senor

Author

Ge, Yixian ; Wang, Ming ; Yan, Haitao

Author_Institution

Sch. of Phys. Sci. & Technol., Nanjing Normal Univ., Nanjing

fYear

2008

fDate

8-11 Dec. 2008

Firstpage

1

Lastpage

4

Abstract

The optical MEMS pressure sensor with a planar and mesa membrane is presented. The operating principle of the MEMS pressure sensor is expatiated by the Fabry-Parot (F-P) interference and the relation between deflection and pressure is analyzed. The fabrication of each diaphragm is described. A phase demodulation method based on a Fourier transformation is explored, which can reduce errors resulting from intensity variations of a light source. Experimental results demonstrate that the sensor has reasonable linearity, sensitivity, and a wide pressure measurement range.

Keywords

Fabry-Perot interferometers; Fourier transforms; demodulation; fibre optic sensors; microsensors; pressure sensors; Fabry-Parot interference; Fourier transformation; intensity variations; mesa membrane; optical MEMS pressure sensor; optical fiber sensor; phase demodulation method; Biomembranes; Demodulation; Fabry-Perot; Interference; Light sources; Linearity; Micromechanical devices; Optical device fabrication; Optical sensors; Pressure measurement; F-P interference; MEMS; mesa membrane; optical fiber sensor; phase demodulation;

fLanguage

English

Publisher

ieee

Conference_Titel

PhotonicsGlobal@Singapore, 2008. IPGC 2008. IEEE

Conference_Location

Singapore

Print_ISBN

978-1-4244-3901-0

Electronic_ISBN

978-1-4244-2906-6

Type

conf

DOI

10.1109/IPGC.2008.4781338

Filename

4781338