• DocumentCode
    271308
  • Title

    Study of the Spatiotemporal Evolution of Microwave Plasma in Argon

  • Author

    Baeva, Margarita ; Andrasch, Mathias ; Ehlbeck, Jörg ; Weltmann, Klaus-Dieter ; Loffhagen, D.

  • Author_Institution
    INP Greifswald, Greifswald, Germany
  • Volume
    42
  • Issue
    10
  • fYear
    2014
  • fDate
    Oct. 2014
  • Firstpage
    2774
  • Lastpage
    2775
  • Abstract
    The knowledge of the distribution of electromagnetic field and plasma parameters is of crucial importance for the development of microwave plasma sources. To that purpose, a time-dependent 2-D fluid model accompanying experiments has been applied to investigate the coupling between the plasma flow and kinetics and the propagating microwaves.
  • Keywords
    argon; high-frequency discharges; plasma diagnostics; plasma flow; plasma kinetic theory; plasma sources; spatiotemporal phenomena; Ar; argon; electromagnetic field; microwave plasma sources; plasma flow; plasma kinetics; plasma parameters; spatiotemporal evolution; time-dependent 2D fluid model; Argon; Atmospheric modeling; Microwave imaging; Microwave measurement; Microwave propagation; Plasma sources; Plasma diagnostics; plasma simulation; plasma sources; plasma sources.;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/TPS.2014.2323555
  • Filename
    6824222
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=271308