Fabrication and Characterization of Proton-Exchanged Waveguide on X-Cut LiNbO3

Author

Sia, G.Y. ; Teng, J.H. ; Danner, A.J. ; Dogheche, E. ; Yin, R. ; Ang, S.S. ; Chew, A.B. ; Lai, M.Y. ; Gokarna, A. ; Stolz, A. ; Decoster, D. ; Tan, S.Y.

Author_Institution

Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore

fYear

2008

fDate

8-11 Dec. 2008

Firstpage

1

Lastpage

4

Abstract

In this letter, we report proton-exchanged (PE) slab and channel waveguides fabricated on x-cut lithium niobate. The thickness and the optical constants as well as the composition profiles of the PE films at different PE hours are measured using prism coupling technique and secondary ion mass spectroscopy method. Planar and channel waveguide structures are characterized and an 8 times 8 square array of air holes on PE LiNbO₃ waveguide is demonstrated using focused ion beam.

Keywords

focused ion beam technology; lithium compounds; optical constants; optical fabrication; optical films; optical materials; optical planar waveguides; optical prisms; optical testing; secondary ion mass spectra; thickness measurement; LiNbO₃; air hole array; channel waveguide fabrication; ion beam focusing; optical constant; planar waveguide structure; prism coupling technique; proton-exchanged film; proton-exchanged slab waveguide; secondary ion mass spectroscopy method; Lithium niobate; Mass spectroscopy; Optical coupling; Optical device fabrication; Optical films; Optical waveguides; Particle beam optics; Planar waveguides; Slabs; Thickness measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

PhotonicsGlobal@Singapore, 2008. IPGC 2008. IEEE

Conference_Location

Singapore

Print_ISBN

978-1-4244-3901-0

Electronic_ISBN

978-1-4244-2906-6

Type

conf

DOI

10.1109/IPGC.2008.4781358

Filename

4781358