DocumentCode
2713367
Title
The influence of space charge effect and stochastic effects on spatial resolution of nuclear microprobe
Author
Nedoreshta, V.N. ; Roshchupkin, S.P.
Author_Institution
Inst. of Appl. Phys., Nat. Acad. of Sci., Sumy, Ukraine
Volume
2
fYear
2005
fDate
12-17 Sept. 2005
Firstpage
133
Abstract
The influence of the space charge effect and stochastic effects on spatial resolution of nuclear microprobe is theoretically studied. Beam broadening is also studied due to the influence of the space charge with the set distribution and also due to the influence of stochastic effects of Coulomb interactions. The total influence of the given effects was considered. It is shown that for small currents the influence of the space charge is not essential. With the increase of the current, the influence of the space charge increases and becomes commensurable with the influence of stochastic effects.
Keywords
ion beam effects; ion microprobe analysis; proton beams; space charge; stochastic processes; Coulomb interactions; beam broadening; nuclear microprobe; set distribution; space charge effect; spatial resolution; stochastic effects; Differential equations; Electrostatics; Erbium; Integral equations; Particle beams; Physics; Protons; Space charge; Spatial resolution; Stochastic processes;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Optoelectronics and Lasers, 2005. Proceedings of CAOL 2005. Second International Conference on
Print_ISBN
0-7803-9130-6
Type
conf
DOI
10.1109/CAOL.2005.1553939
Filename
1553939
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