Author_Institution :
Department of Mechanical and Process Engineering, ETH Z??rich, Zürich, Switzerland
Abstract :
The IEEE Journal of Microelectromechanical Systems started to welcome review papers from all microelectromechanical systems (MEMS) related fields. A review paper shall provide a complete overview and critical evaluation of the state of the art in a particular MEMS domain; it shall contain honest discussions and targeted conclusions on well-defined aspects. Thus, review papers allow readers to find the most promising and high impact concepts and solutions in design, fabrication, packaging, or test of MEMS and related areas. Young researchers will read review papers for an efficient and qualified start into a new field; senior academics and industrial professionals will include the conclusions in their discussions on future research directions and strategic considerations.
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2014.2323188