Title :
Fiber attachment for waveguide based devices using V-grooves made in silicon
Author :
Istrate, G. ; Kusko, M. ; Podaru, C. ; Manea, E. ; Schiopip, P.
Author_Institution :
IMT-Bucharest, Bucharest, Romania
Abstract :
We developed a technique for keeping steady the optical fiber into V-grooves made by an anisotropic etching of the silicon substrate. These grooves have specific dimensions that were calculated for the center of the fiber to be at the same level (to be aligned) with an SU-8 waveguide made at the surface of the Si wafer. Simulation of the process using OPTI-FDTD has shown that the coupling efficiency between the radiations from the fiber with the waveguide is 20%.
Keywords :
etching; optical fibre fabrication; optical planar waveguides; silicon; 20 percent; OPTI-FDTD; SU-8 waveguide; V-grooves; anisotropic etching; fiber attachment; optical fiber; silicon substrate; specific dimensions; waveguide based devices; Anisotropic magnetoresistance; Coupling circuits; Etching; Integrated optics; Optical coupling; Optical devices; Optical fiber devices; Optical fibers; Optical waveguides; Silicon;
Conference_Titel :
Semiconductor Conference, 2004. CAS 2004 Proceedings. 2004 International
Print_ISBN :
0-7803-8499-7
DOI :
10.1109/SMICND.2004.1402850
