Electromagnetic Investigation on RF Spiral Inductors with Inhomogeneous Patterned Deep-Trench Isolation

Author

Wane, S. ; Bajon, D.

Author_Institution

SUPAERO, National High Sch. of Aeronaut., Toulouse

fYear

2006

fDate

11-16 June 2006

Firstpage

1373

Lastpage

1376

Abstract

Comprehensive investigations on RF spiral inductors are carried out from electromagnetic analysis using the hybrid TWF method. The effects of deep-trench patterning (DTP) on the quality factor and on substrate coupling are presented. Impacts of different DTP options as well as the influence of buried layers grounding on Q-factor are discussed. Combination of DTP with topological optimization has demonstrated high Q-factor improvement. Comparisons of obtained results with commercial EM tools and with measurement data show satisfactory agreement

Keywords

Q-factor; buried layers; inductors; isolation technology; Q-factor; RF spiral inductors; deep-trench isolation; deep-trench patterning; electromagnetic analysis; hybrid TWF method; quality factor; substrate coupling; topological optimization; Desktop publishing; Eddy currents; Electromagnetic induction; Energy dissipation; Grounding; Inductors; Q factor; Radio frequency; Spirals; Substrates; Deep-trench Isolation; Eddy Current; RF Inductors; Substrate Coupling; TWF method;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest, 2006. IEEE MTT-S International

Conference_Location

San Francisco, CA

ISSN

0149-645X

Print_ISBN

0-7803-9541-7

Electronic_ISBN

0149-645X

Type

conf

DOI

10.1109/MWSYM.2006.249506

Filename

4015182