Title :
Miniature CPW Inductors for 3-D MMICs
Author :
Van Tuyen Vo ; Krishnamurthy, Lokesh ; Sun, Qing ; Rezazadeh, Ali A.
Author_Institution :
Electromagn. Centre for Microwave & mm-Wave Designs & Applications, Manchester Univ.
Abstract :
Newly developed miniaturized CPW inductors using the great flexibility of three-dimensional multilayer technology have been designed and fabricated. Their measured performances are also presented and compared. The area of these inductors are almost four time smaller than that of planar spiral inductors while maintaining the same performance. The miniaturized inductors are constructed using a combination of three metal and two polyimide dielectric layers on semi-insulating GaAs substrates
Keywords :
III-V semiconductors; MMIC; coplanar waveguides; dielectric materials; gallium arsenide; inductors; multilayers; 3D MMIC; 3D multilayer technology; CPW inductors; GaAs; miniaturized inductors; planar spiral inductors; polyimide dielectric layers; semi-insulating substrates; Coplanar waveguides; Dielectric measurements; Dielectric substrates; Gallium arsenide; Inductors; MMICs; Nonhomogeneous media; Performance evaluation; Polyimides; Spirals; MMICs; Spiral inductors; integrated compact inductors;
Conference_Titel :
Microwave Symposium Digest, 2006. IEEE MTT-S International
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-9541-7
Electronic_ISBN :
0149-645X
DOI :
10.1109/MWSYM.2006.249507
