3-D Integrated Inductors and Transformers on Liquid Crystal Polymer Substrate

Author

Weon, Dae-Hee ; Katehi, Linda P B ; Mohammadi, Saeed

Author_Institution

Sch. of Electr. & Comput. Eng., Purdue Univ., West Lafayette, IN

fYear

2006

fDate

11-16 June 2006

Firstpage

1381

Lastpage

1384

Abstract

We have designed, fabricated, and tested inductors and transformers on LCP substrate which exhibit high Q and high self-resonant frequency using a 3-D fabrication technology. A 1.1nH inductor in this work achieves a quality factor Q of 76 at 12GHz, with Q over 60 for frequencies from 8 to 18GHz. A 1:1 ratio transformer with coupling factors, k of higher than 0.6 and a self resonance frequency of 23GHz is also fabricated and tested. The technology for these inductors and transformers is based on one step Cr/Au metal deposition and electroplating

Keywords

Q-factor; chromium; electroplating; gold; inductors; liquid crystal polymers; transformers; 23 GHz; 3D fabrication technology; 3D integrated inductors; 8 to 18 GHz; Cr-Au; Cr/Au metal deposition; electroplating; liquid crystal polymer substrate; quality factor; self-resonant frequency; transformers; Automatic testing; Chromium; Fabrication; Gold; Inductors; Liquid crystal polymers; Q factor; Resonance; Resonant frequency; Transformers; High quality factor; LCP; flexible electronics; high frequency; integrated inductor; stressed metal; three dimensional fabrication; transformer;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest, 2006. IEEE MTT-S International

Conference_Location

San Francisco, CA

ISSN

0149-645X

Print_ISBN

0-7803-9541-7

Electronic_ISBN

0149-645X

Type

conf

DOI

10.1109/MWSYM.2006.249508

Filename

4015184