Title :
An numerical technique for parameter extraction of VLSI interconnection
Author :
Zhao, Yang ; Yun-yi Wang
Author_Institution :
Dept. of Radio Eng., Southeast Univ., Nanjing, China
Abstract :
This letter proposes the substructure-front (S-F) technique in conjunction with geometry independent measured equation of invariance (GIMEI) for fast parameter extraction of multilayer and multiconductor interconnect based on finite element method (FEM) for VLSI circuit analysis. Results show that they are in good agreement with the published results and great computer resource can be saved via the efficient numerical scheme
Keywords :
VLSI; finite element analysis; integrated circuit interconnections; integrated circuit modelling; VLSI interconnection; circuit analysis; finite element method; geometry independent measured equation of invariance; multiconductor interconnect; multilayer interconnect; numerical technique; parameter extraction; substructure-front technique; Conductors; Frequency; Geometry; Integral equations; Integrated circuit interconnections; Laboratories; Millimeter wave measurements; Millimeter wave technology; Parameter extraction; Very large scale integration;
Conference_Titel :
Microwave Conference Proceedings, 1997. APMC '97, 1997 Asia-Pacific
Print_ISBN :
962-442-117-X
DOI :
10.1109/APMC.1997.656397