FDC R2R variation monitoring for sensor level diagnosis in tool condition hierarchy

Tool behavior modeling and diagnosis is a big challenge in modern semiconductor fabrication, in particular for the foundry and analog companies with high product-mix and complicated technology nodes. Tool condition monitoring has been practiced by implementing the FDC (Fault Detection and Classification) system and analyzing large amount of real-time equipment data. This paper continues the work of tool condition hierarchy, where the excursions can be detected in one single overall tool indicator and are intuitively drilled down to the level of sensor groups. A R2R (Run-to-Run) variation monitoring technique is developed in order to correlate the tool faults with single sensor and thus completes the diagnostic gap of the hierarchy. The tool condition monitoring then becomes efficient and tool fault diagnosis can be systematically top-down.