DocumentCode
2716402
Title
Numerical analysis of the effect of geometry on the performance of the Greek cross structure
Author
Newsam, Mark I. ; Walton, Anthony J. ; Fallon, Martin
Author_Institution
Dept. of Electr. Eng., Edinburgh Univ., UK
fYear
1996
fDate
25-28 Mar 1996
Firstpage
247
Lastpage
252
Abstract
This paper examines the effect that geometry has upon the value of resistivity that is extracted from Greek cross type structures. This work suggests that structure to structure variability of the Greek cross can be reduced through the choice of the appropriate layout
Keywords
electric resistance measurement; Greek cross structure; geometry; numerical analysis; sheet resistivity measurement; Arm; Buildings; Conductivity; Data mining; Geometry; Numerical analysis; Proximity effect; Size measurement; Testing; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronic Test Structures, 1996. ICMTS 1996. Proceedings. 1996 IEEE International Conference on
Conference_Location
Trento
Print_ISBN
0-7803-2783-7
Type
conf
DOI
10.1109/ICMTS.1996.535655
Filename
535655
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