Biosensor array microsystem on a CMOS amperometric readout chip

A single-chip integrated microsystem with a CMOS amperometric circuit, on-chip electrodes, a protein-based biointerface, and packaging for biosensor arrays is presented. A 2×2 gold electrode array was fabricated on the surface of the CMOS instrumentation chip. An all-parylene packaging scheme was developed for compatibility with liquid test environments as well as a harsh piranha electrode cleaning process. Proper operation of the chip was demonstrated with electrochemical and biological cyclic voltammetry experiments. A cytochrome PpcA protein interface was implemented to measure concentrations of Fe-NTA using the integrated amperometric microsystem.