Analysis of high temperature SOI micro-hotplates

This work reports on the analysis and modelling of novel, tungsten-based SOI micro-hotplates for smart silicon-based gas sensors. Tungsten has very good physical properties for use in micro-heaters, is CMOS compatible, and can be used as an interconnect in CMOS circuits. Compared to current commercial solid state gas sensors, gas sensors based on these micro-hotplates offer low power consumption, full CMOS compatibility and low cost, achieved through smart CMOS integration of the sensing device, transducers, and MOSFET drive circuitry. Electro-thermal simulations and mathematical analysis are presented. In addition, mechanical stresses resulting from the high temperatures reached are also analysed.