DocumentCode
2719006
Title
MEMS optimization using genetic algorithms
Author
Leu, George ; Simion, Stefan ; Serbanescu, Alexandru
Author_Institution
Mil. Tech. Acad., Bucharest, Romania
Volume
2
fYear
2004
fDate
4-6 Oct. 2004
Firstpage
475
Abstract
Using genetic algorithms, an original method for MEMS optimization is proposed in This work. The optimized MEMS device should provide both minimum switching time and minimum equivalent capacitance, so the highest operating frequency is obtained. By analyzing the results obtained on the switching time for different operating voltage and geometrical configurations, it is important to mention that by using GA, the MEMS behavior is in good agreement with the expected results obtained by classical means.
Keywords
capacitance; genetic algorithms; micromechanical devices; GA; MEMS optimization; equivalent capacitance; genetic algorithms; geometrical configurations; microelectromechanical system; switching time; Capacitance; Differential equations; Erbium; Frequency; Genetic algorithms; Micromechanical devices; Microwave devices; Optimization methods; Switches; Switching circuits;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 2004. CAS 2004 Proceedings. 2004 International
Print_ISBN
0-7803-8499-7
Type
conf
DOI
10.1109/SMICND.2004.1403052
Filename
1403052
Link To Document