Title :
Introducing Mansim into the manufacturing environment
Author_Institution :
Motorola East Kilbridge, UK
Abstract :
This paper describes the work done within Motorola East Kilbride to provide a fully automatic simulation environment. This environment was developed so that no ongoing support would be required thus eliminating the need for “model building” support personnel. There are two fabrication areas in Motorola East Kilbride called MOS1 and MOS9; the simulation activity has been conducted within MOS9. Up to the end of 1993 there had been an increasing number of “statements” from the U.S. that simulation could provide some of the solutions to improved wafer fab manufacturing. Also, in 1993, we had had a demonstration of the simulation package called Mansim from Tyecin Corporation. This convinced us that simulation may provide some solutions, however, prior to any decision being made we decided to gather as much information as possible by direct contact from various personnel in the U.S. The information and advise that we collected had an influence on how we approached the problem of introducing simulation into MOS9 but only confirmed our choice of simulation tool, Mansim
Keywords :
integrated circuit manufacture; production engineering computing; semiconductor process modelling; MOS9; Mansim package; Motorola East Kilbride; Tyecin Corporation; automatic simulation; wafer fab manufacturing;
Conference_Titel :
Improving the Efficiency of IC Manufacturing Technology, IEE Colloquium on
Conference_Location :
London
DOI :
10.1049/ic:19950931