Title :
Precise simulation of surface transverse wave devices by discrete Green function theory
Author :
Hashimoto, Ken-Ya ; Yamaguchi, Masatsune
fDate :
Oct. 31 1994-Nov. 3 1994
Abstract :
The paper proposes a precise simulation method for devices employing surface-transverse-waves (STWs) which propagate under grating structure and possess strong dispersive nature. The method is based upon the coupling-of-modes (COM) theory, where four parameters required for the analysis, i.e., static capacitance, and self-coupling, mutual coupling and transduction coefficients are determined as a function of frequency by the discrete Green function theory. The method has applied to the simulation of STW resonator filters on quartz, and the result was in good agreement with experiments. It was shown that the passband shape as well as the resonance frequency are most dependent on the thickness and width of grating electrodes. This is because STWs on quartz with weak piezoelectric coupling are substantially guided close to the surface by mass-loading effect of the grating
Keywords :
Green´s function methods; circuit analysis computing; coupled mode analysis; quartz; surface acoustic wave resonator filters; surface acoustic waves; STW resonator filters; SiO2; coupling-of-modes theory; discrete Green function theory; grating electrodes; grating structure; mass-loading effect; mutual coupling; passband shape; resonance frequency; self-coupling; simulation; static capacitance; strong dispersive nature; surface transverse wave devices; thickness; transduction coefficients; weak piezoelectric coupling; width; Circuit simulation; Coupled mode analysis; Green´s functions; Quartz materials/devices; Surface acoustic wave resonator filters; Surface acoustic waves;
Conference_Titel :
Ultrasonics Symposium, 1994. Proceedings., 1994 IEEE
Conference_Location :
Cannes, France
Print_ISBN :
0-7803-2012-3
DOI :
10.1109/ULTSYM.1994.401590