• DocumentCode
    2721516
  • Title

    Novel interconnect methodologies for ultra-thin chips on foils

  • Author

    Sridhar, A. ; Cauwe, M. ; Fledderus, H. ; Kusters, R.H.L. ; van den Brand, J.

  • Author_Institution
    Holst Centre, TNO, Eindhoven, Netherlands
  • fYear
    2012
  • fDate
    May 29 2012-June 1 2012
  • Firstpage
    238
  • Lastpage
    244
  • Abstract
    Reliable interconnection technology is key to the realization of reliable hybrid microelectronic systems that combine printed electronics and silicon technology. Flexible hybrid electronic systems-in-foil (SiF) that are typically suited for roll-to-roll (R2R) manufacturing place additional requirements and demands on interconnects. In this paper, three novel interconnection methodologies for SiF are compared for a novel face-up integration approach for ultra-thin chip on foil. Laser scribing, inkjet printing and laser-induced forward transfer (LIFT) are the technologies compared with each other, as well as with electroplating, a standard technology widely used in the electronics industry. The comparison is based on experimental investigation into via filling, interconnect deposition, electrical conductivity and interconnect reliability. The selection of an interconnection technology for practical implementation is the key outcome of this paper.
  • Keywords
    electrical conductivity; electroplating; elemental semiconductors; flexible electronics; ink jet printing; integrated circuit interconnections; integrated circuit reliability; laser beam applications; silicon; thin films; LIFT; R2R manufacturing; Si; SiF; electrical conductivity; electronics industry; electroplating; face-up integration approach; flexible hybrid electronic systems-in-foil; hybrid microelectronic systems; inkjet printing; interconnect deposition; interconnect methodology; interconnect reliability; laser scribing; laser-induced forward transfer; printed electronics; roll-to-roll manufacturing; silicon technology; ultrathin chips; Copper; Filling; Integrated circuit interconnections; Lasers; Materials; Printing; Silver;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronic Components and Technology Conference (ECTC), 2012 IEEE 62nd
  • Conference_Location
    San Diego, CA
  • ISSN
    0569-5503
  • Print_ISBN
    978-1-4673-1966-9
  • Electronic_ISBN
    0569-5503
  • Type

    conf

  • DOI
    10.1109/ECTC.2012.6248834
  • Filename
    6248834