DocumentCode :
272205
Title :
Performance analysis and characterisation of micro-nanopositioning systems
Author :
Ning Tan ; Clévy, Cédric ; Chaillet, N.
Author_Institution :
AS2M Dept., Femto-st Inst., Besançon, France
Volume :
50
Issue :
24
fYear :
2014
fDate :
11 20 2014
Firstpage :
1853
Lastpage :
1855
Abstract :
Separation and quantification of error components in micro-nanopositioning systems are presented with theoretical analysis and experimental characterisation, which are illustrated with a single-axis nanopositioning stage. The concepts of intrinsic and extrinsic repeatabilities are proposed.
Keywords :
nanopositioning; robots; error components quantification; error components separation; extrinsic repeatabilities; intrinsic repeatabilities; micronanopositioning systems; performance analysis; single-axis nanopositioning stage;
fLanguage :
English
Journal_Title :
Electronics Letters
Publisher :
iet
ISSN :
0013-5194
Type :
jour
DOI :
10.1049/el.2014.0926
Filename :
6969328
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=272205
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