Title :
Imprint master fabricated by ultra precision machining for optical waveguide
Author :
Lee, Woo-Jin ; Lim, Jung Woon ; Hwang, Sung Hwan ; Rho, Byung Sup
Author_Institution :
Integrated Opt. Module Lab., Korea Photonics Technol. Inst., Gwangju
Abstract :
An imprint master was fabricated by ultra precision machining (UPM) for optical waveguide. And we manufactured multimode waveguides using a thermal imprint method and the UPM master. We found that the master was suitable for an optical waveguide because it had a simple process and a fine surface profile.
Keywords :
machining; optical fabrication; optical waveguides; imprint master; multimode waveguides; optical fabrication; optical waveguide; thermal imprint method; ultraprecision machining; Integrated optics; Machining; Manufacturing; Nickel; Optical device fabrication; Optical films; Optical materials; Optical polymers; Optical surface waves; Optical waveguides;
Conference_Titel :
Opto-Electronics and Communications Conference, 2008 and the 2008 Australian Conference on Optical Fibre Technology. OECC/ACOFT 2008. Joint conference of the
Conference_Location :
Sydney
Print_ISBN :
978-0-85825-807-5
Electronic_ISBN :
978-0-85825-807-5
DOI :
10.1109/OECCACOFT.2008.4610365
