• DocumentCode
    2723784
  • Title

    Fluxless tin bonding of silicon chips to aluminum substrates

  • Author

    Hsu, Shou-Jen ; Sha, Chu-Hsuan ; Lee, Chin C.

  • Author_Institution
    Electr. Eng. & Comput. Sci., Mater. & Manuf. Technol., Univ. of California, Irvine, CA, USA
  • fYear
    2012
  • fDate
    May 29 2012-June 1 2012
  • Firstpage
    1136
  • Lastpage
    1139
  • Abstract
    The high thermal conductivity and light weight properties of aluminum (Al) make it a promising material in high power device packaging and automotive design applications. A primary challenge is its high coefficient of thermal expansion (CTE) of 23 ppm/°C. In this research, we investigated the possibility of surmounting this challenge by bonding large Si chips to Al substrates using fluxless tin (Sn). Si versus Al pair probably has the largest CTE mismatch among all bonded structures in electronic packaging. In experiments, 0.1μm Cr layer and 0.2 μm Cu layer were deposited on Al substrates, followed by an electroplated thicker 25 μm copper (Cu) layer. The Sn solder layer was then electroplated over the Cu followed immediately by thin (0.1 μm) silver (Ag) layer. The bonding process is entirely fluxless. The joint thickness was controlled either by bonding pressure or by Cu spacers. Microstructure and composition of the joints were studied under scanning electron microscopy (SEM) and energy dispersive X-ray spectroscopy (EDX). Despite the large CTE mismatch, the bonded structures did not break. This preliminary result suggests potential adaption of Al substrates in electronic packaging where Al is avoided because of its high CTE.
  • Keywords
    X-ray chemical analysis; aluminium; bonding processes; copper; electronics packaging; electroplating; elemental semiconductors; microprocessor chips; scanning electron microscopy; silicon; solders; thermal conductivity; tin; Al; CTE mismatch; Cu; Si; Sn; Sn solder layer; aluminum substrates; automotive design; chromium layer; copper layer; electronic packaging; electroplating; energy dispersive X-ray spectroscopy; fluxless tin bonding; high power device packaging; light weight properties; scanning electron microscopy; silicon chips; size 0.1 mum; size 0.2 mum; size 25 mum; thermal conductivity; thermal expansion coefficient; Bonding; Joints; Silicon; Soldering; Substrates; Tin;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronic Components and Technology Conference (ECTC), 2012 IEEE 62nd
  • Conference_Location
    San Diego, CA
  • ISSN
    0569-5503
  • Print_ISBN
    978-1-4673-1966-9
  • Electronic_ISBN
    0569-5503
  • Type

    conf

  • DOI
    10.1109/ECTC.2012.6248978
  • Filename
    6248978