DocumentCode :
2724961
Title :
TCAD modeling of NPN-SiGe-HBT electrical performance improvement through extrinsic stress layer
Author :
Al-Sa´di, M. ; Fregonese, S. ; Maneux, C. ; Zimmer, T.
Author_Institution :
IMS Lab., Univ. of Bordeaux 1, Talence, France
fYear :
2010
fDate :
16-19 May 2010
Firstpage :
387
Lastpage :
390
Abstract :
The impact of introducing an extrinsic stress layer to NPN-SiGe-HBT device on the electrical properties and frequency response has been studied using TCAD modeling. Simulations based on Hydrodynamic (HD) and Drift-Diffusion (DD) models have been carried out to clarify the influence of adding the extrinsic stress layer on the device electrical performance (static and dynamic). Simulation results show that NPN-SiGe-HBT device with extrinsic stress layer exhibit better frequency characteristics in comparison with equivalent conventional HBT device (without extrinsic stress layer). An approximately, 3% improvement in ft, and 5% improvement in fmax have been achieved. In addition to that, a decrease in the transit time of the device has been observed. That can be fully accounted to the influence of introducing the extrinsic stress layer on the device.
Keywords :
frequency response; heterojunction bipolar transistors; hydrodynamics; technology CAD (electronics); HBT device; NPN-SiGe-HBT electrical performance improvement; TCAD modeling; drift-diffusion model; electrical properties; extrinsic stress layer; frequency response; hydrodynamic model; Compressive stress; Electron mobility; Etching; Fabrication; Frequency response; Germanium silicon alloys; Heterojunction bipolar transistors; Silicon germanium; Tensile strain; Tensile stress;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microelectronics Proceedings (MIEL), 2010 27th International Conference on
Conference_Location :
Nis
Print_ISBN :
978-1-4244-7200-0
Type :
conf
DOI :
10.1109/MIEL.2010.5490457
Filename :
5490457
Link To Document :
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