• DocumentCode
    2725129
  • Title

    Progress towards achieving diamond waveguides

  • Author

    Hiscocks, M.P. ; Ladouceur, F. ; Ganesan, K. ; Gibson, B.C. ; Prawer, S.

  • Author_Institution
    Sch. of EE&T, UNSW, Sydney, NSW
  • fYear
    2008
  • fDate
    7-10 July 2008
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We report on the progress made towards achieving light guidance in long diamond waveguides (i.e. > mm) fabricated using a combination of photolithography, reactive ion etching (RIE), ion implantation and FIB techniques.
  • Keywords
    diamond; focused ion beam technology; ion implantation; optical fabrication; optical waveguides; photolithography; ridge waveguides; sputter etching; C; FIB technique; diamond waveguides; ion implantation; light guidance; photolithography; reactive ion etching; Australia; Etching; Ion implantation; Lithography; Optical waveguides; Plasma applications; Plasma immersion ion implantation; Quantum computing; Resists; Silicon compounds;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Opto-Electronics and Communications Conference, 2008 and the 2008 Australian Conference on Optical Fibre Technology. OECC/ACOFT 2008. Joint conference of the
  • Conference_Location
    Sydney
  • Print_ISBN
    978-0-85825-807-5
  • Electronic_ISBN
    978-0-85825-807-5
  • Type

    conf

  • DOI
    10.1109/OECCACOFT.2008.4610558
  • Filename
    4610558
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2725129