Title :
T/RH-sensitive thick-film structures for ecological control and environment monitoring
Author :
Shpotyuk, O. ; Hadzaman, I. ; Klym, H. ; Brunner, M.
Author_Institution :
Lviv Inst. of Mater. of SRC "Carat", Lviv, Ukraine
Abstract :
T/RH-sensitive thick-film structures based on spinel-type semiconducting and dielectric ceramics of different chemical composition Cu0.1Ni0.1Co1.6Mn1.2O4 (with p+-type of electrical conductivity), Cu0.1Ni0.8Co0.2Mn1.9O4 (with p-type of electrical conductivity) and magnesium aluminate MgAl2O4 ceramics were fabricated and studied. These elements are shown to be successfully applied for integrated T/RH-sensitive sensor structures of environmental monitoring and control.
Keywords :
ceramics; cobalt compounds; copper compounds; dielectric devices; environmental factors; magnesium compounds; nickel compounds; semiconductor devices; thick film devices; two-dimensional spectra; Cu0.1Ni0.1Co1.6Mn1.2O4; MgAl2O4; ecological control; electrical conductivity; environment monitoring; environmental monitoring; sensitive sensor structures; spinel-type semiconducting-dielectric ceramics; thick-film structures; Ceramics; Conductivity; Dielectrics; Humidity; Monitoring; Temperature control; Temperature sensors; Thick film sensors; Thick films; Thickness control;
Conference_Titel :
Microelectronics Proceedings (MIEL), 2010 27th International Conference on
Conference_Location :
Nis
Print_ISBN :
978-1-4244-7200-0
DOI :
10.1109/MIEL.2010.5490491