Title :
Quasi 3D model of resonance piezoelectric array sensor
Author :
Kolev, D. ; Todorova, V.
Author_Institution :
Tech. Univ. - Gabrovo, Gabrovo, Bulgaria
Abstract :
The piezoelectric ceramic substrates can be used not only for switch mode resonance sensors but they can be applied in sensors which give broader range of data. Such kind of sensors are resonance piezoelectric array ones because they offer the means of measuring not only the presence of applied mechanical stress but also the local stress intensity. For this purpose a two-dimensional mathematical model based on the transformed form of Sauerbrey equation is under investigation for applicability for the resonance piezoelectric array sensors. The aim of the current research is the proposition of a model foundation for further development of the physic model for the resonance array sensor system as the quantitative solutions to be in reach.
Keywords :
mathematical analysis; piezoceramics; piezoelectric transducers; sensor arrays; Sauerbrey equation; applied mechanical stress; local stress intensity; piezoelectric ceramic substrates; quasi 3D model; resonance piezoelectric array sensor; resonance piezoelectric array sensors; switch mode resonance sensors; two-dimensional mathematical model; Ceramics; Equations; Mathematical model; Mechanical sensors; Mechanical variables measurement; Physics; Resonance; Sensor arrays; Stress measurement; Switches;
Conference_Titel :
Microelectronics Proceedings (MIEL), 2010 27th International Conference on
Conference_Location :
Nis
Print_ISBN :
978-1-4244-7200-0
DOI :
10.1109/MIEL.2010.5490500