Title :
Diffraction gratings with anticorrelated relief for new surface plasmon polariton photodetectors & sensors
Author :
Dmitruk, N.L. ; Mamykin, S.V. ; Sosnova, M.V. ; Korovin, A.V. ; Mynko, V.I.
Author_Institution :
Inst. for Phys. of Semicond., NAS of Ukraine, Kiev, Ukraine
Abstract :
In this work new method for diffraction grating formation are suggested. This method allows to produce periodically corrugated thin metal films with transmittance strongly depends on the mutual correlation of two metal film interfaces with air and semiconductor. This could be the final stage of manufacturing of this type photodetector when all elements and circuits on the chip (like CCD matrix) are already formed.
Keywords :
diffraction gratings; photodetectors; polaritons; surface plasmon resonance; anticorrelated relief; diffraction gratings; surface plasmon polariton photodetectors; Corrugated surfaces; Diffraction gratings; Etching; Gold; Nanowires; Photoconductivity; Photodetectors; Plasmons; Semiconductor device manufacture; Semiconductor films;
Conference_Titel :
Microelectronics Proceedings (MIEL), 2010 27th International Conference on
Conference_Location :
Nis
Print_ISBN :
978-1-4244-7200-0
DOI :
10.1109/MIEL.2010.5490505