DocumentCode
2725740
Title
Diffraction gratings with anticorrelated relief for new surface plasmon polariton photodetectors & sensors
Author
Dmitruk, N.L. ; Mamykin, S.V. ; Sosnova, M.V. ; Korovin, A.V. ; Mynko, V.I.
Author_Institution
Inst. for Phys. of Semicond., NAS of Ukraine, Kiev, Ukraine
fYear
2010
fDate
16-19 May 2010
Firstpage
175
Lastpage
176
Abstract
In this work new method for diffraction grating formation are suggested. This method allows to produce periodically corrugated thin metal films with transmittance strongly depends on the mutual correlation of two metal film interfaces with air and semiconductor. This could be the final stage of manufacturing of this type photodetector when all elements and circuits on the chip (like CCD matrix) are already formed.
Keywords
diffraction gratings; photodetectors; polaritons; surface plasmon resonance; anticorrelated relief; diffraction gratings; surface plasmon polariton photodetectors; Corrugated surfaces; Diffraction gratings; Etching; Gold; Nanowires; Photoconductivity; Photodetectors; Plasmons; Semiconductor device manufacture; Semiconductor films;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronics Proceedings (MIEL), 2010 27th International Conference on
Conference_Location
Nis
Print_ISBN
978-1-4244-7200-0
Type
conf
DOI
10.1109/MIEL.2010.5490505
Filename
5490505
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