Title :
ESD flooring: an engineering evaluation
Author :
Robinson-Hahn, Donna
Author_Institution :
AT&T Microelectron., Allentown, PA, USA
Abstract :
An integrated circuit (IC) can suffer catastrophic damage from as little as 50 volts while manufacturing personnel can generate over 10000 volts by simply walking across a production floor. This paper reports the results of an extensive two year study of over twenty reportedly ESD-safe floors that are used in combating this threat.
Keywords :
electrostatic discharge; human factors; integrated circuit manufacture; safety; surface charging; ESD flooring; ESD-safe floors; IC production; engineering evaluation; integrated circuit damage; manufacturing personnel; production floor; Electrostatic discharge; Integrated circuit manufacture; Legged locomotion; Personnel; Production;
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium Proceedings, 1995
Conference_Location :
Phoenix, AZ, USA
Print_ISBN :
1-878303-59-7
DOI :
10.1109/EOSESD.1995.478280
