Device level Maverick screening - detection of risk devices through Independent Component Analysis

Reliable semiconductor devices are of paramount importance as they are used in safety relevant applications. To guarantee the functionality of the devices, various electrical measurements are analyzed and devices outside pre-defined specification limits are scrapped. Despite numerous verification tests, risk devices (Mavericks) remain undetected. To counteract this, remedial actions are given by statistical screening methods, such as Part Average Testing and Good Die in Bad Neighborhood. For new semiconductor technologies it is expected that, due to the continuous miniaturization of devices, the performance of the currently applied screening methods to detect Mavericks will lack accuracy. To meet this challenge, new screening approaches are required. Therefore, we propose to use a data transformation which analyzes information sources instead of raw data. First results confirm that Independent Component Analysis extracts meaningful measurement information in a compact representation to enhance the detection of Mavericks.