Title :
A MEMS Non-Planar Constant Beamwidth Ultrasonic Sensor Microarray
Author :
Meloche, Matthew ; Chowdhury, Sazzadur
Author_Institution :
Electr. & Comput. Eng., Windsor Univ., Ont.
Abstract :
This paper develops the theory of a MEMS nonplanar intrinsically beamforming ultrasonic sensor microarray. The microarray exploits the geometrical properties of a doubly ruled surface to realize a constant beamwidth broadband directional sensitivity without microelectronic signal processing as required by conventional acoustic beamformers. The 1000 times 1000 mum2 array consists of 25 (5 times 5) capacitive type ultrasonic sensors and can provide a constant beamwidth broadband beamforming in the 1.70-3.00 MHz frequency range. The tiered geometry has an out-of-plane angle of plusmn 10 degrees which translates into a 20 degree wide constant beamwidth broadband beam. The developed theory has been verified by extensive analytical and 3D FEA simulations using IntelliSuitetrade MEMS design tools. The device has excellent potential to be used in automotive collision avoidance applications
Keywords :
finite element analysis; microsensors; signal processing; ultrasonic transducers; 1.70 to 3 MHz; FEA simulations; IntelliSuitetrade; MEMS; acoustic beamformers; automotive collision avoidance; beamforming ultrasonic sensor microarray; capacitive type ultrasonic sensors; microelectronic signal processing; Acoustic beams; Acoustic sensors; Acoustic signal processing; Array signal processing; Capacitive sensors; Frequency; Geometry; Microelectronics; Micromechanical devices; Sensor arrays;
Conference_Titel :
Circuits and Systems, 2006 IEEE North-East Workshop on
Conference_Location :
Gatineau, Que.
Print_ISBN :
1-4244-0416-9
Electronic_ISBN :
1-4244-0417-7
DOI :
10.1109/NEWCAS.2006.250938
