Title :
Use of static-safe polymers in automated handling equipment
Author :
Campbell, Richard W. ; Tan, Wayne
Author_Institution :
Polymer Corp., Reading, PA, USA
Abstract :
Use of inherent static dissipative and antistatic polymers in automated handling equipment in a semiconductor manufacturing environment can minimize electrostatic discharge (ESD) hazards and improve product yield. These new ESD-safe polymers can replace many of the traditionally static generative materials in almost every application involving sensitive product handling.
Keywords :
electrostatic discharge; polymers; safety; semiconductor device manufacture; antistatic polymers; automated handling equipment; electrostatic discharge hazards; product yield; safety; semiconductor manufacturing; static dissipative polymers; Electrostatic discharge; Hazards; Manufacturing automation; Polymers; Semiconductor device manufacture; Semiconductor materials;
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium Proceedings, 1995
Conference_Location :
Phoenix, AZ, USA
Print_ISBN :
1-878303-59-7
DOI :
10.1109/EOSESD.1995.478288