2D magnetic micro fluxgate system with digital signal output

The magnetic microsystem presented contains, on a single chip, two orthogonal planar microfluxgate sensors and the complete electronics for fluxgate excitation and signal readout. The system uses on-chip /spl Sigma//spl Delta/ A/D conversion with digital feedback in the magnetic field domain. It is realized in standard CMOS technology followed by post-processing. The system is for use as an electronic compass. Other possible applications are magnetic pattern sensing and nondestructive material testing.