Title :
MEMS inertial sensors and their applications
Author :
Maenaka, Kazusuke
Author_Institution :
Grad. Sch. of Eng., Univ. of Hyogo, Himeji
Abstract :
Micro electro mechanical systems (MEMS) technology has developed considerably in recent years and many sensors utilizing this technology are available in the market. MEMS technology enables miniaturization, mass production, and cost reduction of many sensors. In particular, MEMS inertial sensors that include an acceleration sensor and an angular velocity sensor (gyroscope, or simply ldquogyrordquo) are the most popular devices. Applications of inertial sensors have now extended into the field of networked sensing systems. In this presentation, we will describe current MEMS inertial sensors and their applications.
Keywords :
acceleration measurement; angular velocity measurement; gyroscopes; microsensors; MEMS inertial sensors; MEMS technology; acceleration sensor; angular velocity sensor; gyroscope; micro electro mechanical systems; Acceleration; Angular velocity; Costs; Gyroscopes; Mass production; Mechanical sensors; Mechanical systems; Micromechanical devices; Sensor systems; Sensor systems and applications; Acceleration Sensor; Gyroscope; MEMS; Sensor Integration; Sensors; Transducers;
Conference_Titel :
Networked Sensing Systems, 2008. INSS 2008. 5th International Conference on
Conference_Location :
Kanazawa
Print_ISBN :
978-4-907764-31-9
DOI :
10.1109/INSS.2008.4610859
