Title :
Fabrication and Testing of a TMMF S2030 Based Micro Fluidic Device for Single Cell Analysis
Author :
Mokkapati, V.R.S.S. ; Zhang, L. ; Hanfoug, R. ; Mollinger, J. ; Bastemeijer, J. ; Bossche, A.
Author_Institution :
Dept. of Microelectron., Delft Univ. of Technol./DIMES, Delft
Abstract :
Current paper describes the fabrication and testing of a Lab-on-a-chip device using TMMF S2030 dry film resist for single cell analysis. The device typically consists of a bigger channel (20 mum deep), 3 smaller channels (2 mum deep) with embedded reservoir in between and a detector towards the downstream.Whole device has been fabricated on a standard glass wafer. Electrode configuration is the notable factor in which pre-sorter electrodes were introduced to bring far-off particles to the trapping range. Dielectrophores is technique will be used to trap a single particle/cell with in the reservoir. Bigger channels were fabricated in TMMF and that of the smaller channels in silicon dioxide. Testing of the channels as successfully done using carboxylate modified fluorescent polystyrene beads (wavelength 605 nm).Currently we are working towards trapping a tumorcell and study the viability and detection mechanisms.
Keywords :
bioMEMS; biomedical equipment; microfluidics; tumours; TMMF S2030 dry film resist; carboxylate; dielectrophores; electrode configuration; embedded reservoir; fluorescent polystyrene beads; lab-on-a-chip device; micro fluidic device; single cell analysis; standard glass wafer; tumorcell; Detectors; Electrodes; Fabrication; Fluidic microsystems; Glass; Lab-on-a-chip; Microfluidics; Reservoirs; Resists; Testing; Dielectrophoresis; Lab-on-a-chip; TMMF S2030;
Conference_Titel :
Quantum, Nano and Micro Technologies, 2009. ICQNM '09. Third International Conference on
Conference_Location :
Cancun
Print_ISBN :
978-1-4244-3349-0
Electronic_ISBN :
978-0-7695-3524-1
DOI :
10.1109/ICQNM.2009.19