• DocumentCode
    2729259
  • Title

    Fabrication and Testing of a TMMF S2030 Based Micro Fluidic Device for Single Cell Analysis

  • Author

    Mokkapati, V.R.S.S. ; Zhang, L. ; Hanfoug, R. ; Mollinger, J. ; Bastemeijer, J. ; Bossche, A.

  • Author_Institution
    Dept. of Microelectron., Delft Univ. of Technol./DIMES, Delft
  • fYear
    2009
  • fDate
    1-7 Feb. 2009
  • Firstpage
    86
  • Lastpage
    89
  • Abstract
    Current paper describes the fabrication and testing of a Lab-on-a-chip device using TMMF S2030 dry film resist for single cell analysis. The device typically consists of a bigger channel (20 mum deep), 3 smaller channels (2 mum deep) with embedded reservoir in between and a detector towards the downstream.Whole device has been fabricated on a standard glass wafer. Electrode configuration is the notable factor in which pre-sorter electrodes were introduced to bring far-off particles to the trapping range. Dielectrophores is technique will be used to trap a single particle/cell with in the reservoir. Bigger channels were fabricated in TMMF and that of the smaller channels in silicon dioxide. Testing of the channels as successfully done using carboxylate modified fluorescent polystyrene beads (wavelength 605 nm).Currently we are working towards trapping a tumorcell and study the viability and detection mechanisms.
  • Keywords
    bioMEMS; biomedical equipment; microfluidics; tumours; TMMF S2030 dry film resist; carboxylate; dielectrophores; electrode configuration; embedded reservoir; fluorescent polystyrene beads; lab-on-a-chip device; micro fluidic device; single cell analysis; standard glass wafer; tumorcell; Detectors; Electrodes; Fabrication; Fluidic microsystems; Glass; Lab-on-a-chip; Microfluidics; Reservoirs; Resists; Testing; Dielectrophoresis; Lab-on-a-chip; TMMF S2030;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Quantum, Nano and Micro Technologies, 2009. ICQNM '09. Third International Conference on
  • Conference_Location
    Cancun
  • Print_ISBN
    978-1-4244-3349-0
  • Electronic_ISBN
    978-0-7695-3524-1
  • Type

    conf

  • DOI
    10.1109/ICQNM.2009.19
  • Filename
    4782929