Multi channel high aspect ratio glass microelectrode array for neuroprosthetic applications

To map neural signal in the brain 3D electrodes are desired. 3D electrodes are difficult fabricate due to the cumbersome assembly process. In this work, 2D array of glass electrodes were designed and later assembles into 3D by simple assembly process. Glass was used as a dielectric material to provide better electrical isolation capability and better biocompatibility compared to silicon. Five shanks per 2D array were fabricated and each shank had 5 channels/active sites making it to be 25 channels per 2D array. Four 2D arrays were stacked and wire bonded to give 100 channels per 3D array.