Optimizing pulsed OBIC technique for ESD defect localization

Author

Essely, Fabien ; Guitard, Nicolas ; Darracq, Frédéric ; Pouget, Vincent ; Bafleur, Marise ; Perdu, Philippe ; Touboul, André ; Lewis, Dean

Author_Institution

Lab. IXL, Univ. de Bordeaux, Talence

fYear

2006

fDate

3-7 July 2006

Firstpage

270

Lastpage

275

Abstract

The evolution of laser sources has led to the advent of new laser-based techniques for failure analysis. The pulsed OBIC (optical beam induced current) technique is one of them, which is based on the photoelectric laser stimulation of the device under test (DUT) at a micrometric scale. The suitability of this technique to localize failure sites resulting from electrostatic discharges (ESD) has previously been demonstrated. This paper presents a complementary work on the OBIC experimental procedure for defect localization improving the sensitivity of this technique and thus the probability to localize very small size defects

Keywords

OBIC; electrostatic discharge; failure analysis; integrated circuit testing; ESD defect localization; device under test; electrostatic discharge; failure analysis; optical beam induced current; photoelectric laser stimulation; pulsed OBIC technique; Circuit testing; Electric variables; Electrostatic discharge; Frequency; Inverters; Laser modes; Laser tuning; Optical beams; Optical pulses; Stress;

fLanguage

English

Publisher

ieee

Conference_Titel

Physical and Failure Analysis of Integrated Circuits, 2006. 13th International Symposium on the

Conference_Location

Singapore

Print_ISBN

1-4244-0205-0

Electronic_ISBN

1-4244-0206-9

Type

conf

DOI

10.1109/IPFA.2006.251044

Filename

4017069